High Sensitivity MEMS Strain Sensor: Design and Simulation
نویسندگان
چکیده
منابع مشابه
High Sensitivity MEMS Strain Sensor: Design and Simulation
In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. The current sensor design employs different levels of signal amplifications. These amplificati...
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ژورنال
عنوان ژورنال: Sensors
سال: 2008
ISSN: 1424-8220
DOI: 10.3390/s8042642